JPH0180757U - - Google Patents

Info

Publication number
JPH0180757U
JPH0180757U JP1987176657U JP17665787U JPH0180757U JP H0180757 U JPH0180757 U JP H0180757U JP 1987176657 U JP1987176657 U JP 1987176657U JP 17665787 U JP17665787 U JP 17665787U JP H0180757 U JPH0180757 U JP H0180757U
Authority
JP
Japan
Prior art keywords
ion source
switching
reservoir
sample gas
switching valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987176657U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987176657U priority Critical patent/JPH0180757U/ja
Publication of JPH0180757U publication Critical patent/JPH0180757U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP1987176657U 1987-11-19 1987-11-19 Pending JPH0180757U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987176657U JPH0180757U (en]) 1987-11-19 1987-11-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987176657U JPH0180757U (en]) 1987-11-19 1987-11-19

Publications (1)

Publication Number Publication Date
JPH0180757U true JPH0180757U (en]) 1989-05-30

Family

ID=31468378

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987176657U Pending JPH0180757U (en]) 1987-11-19 1987-11-19

Country Status (1)

Country Link
JP (1) JPH0180757U (en])

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